9-5
Photolithographically produced tuning forks, single- and double-ended (flexural-mode or torsional-mode), can provide low-cost, high-resolution sensors for measuring temperature, pressure, force, and acceleration.  Shown are flexural-mode tuning forks.
Tine
Motion
Text Box: Force
Force
Text Box: Force
Force
Beam
Motion
Tuning Fork Resonator Sensors
   The resonant frequency and Q of a vibrating tuning fork or beam resonator, whether single, double or triple-beam, are sensitive to forces, temperature, and the fluid surrounding the resonator.  Such resonators have been used as accelerometers, pressure sensors, force sensors, gas density sensors, vacuum gauges, and thermometers.

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E. P. EerNisse, R. W. Ward and R. B. Wiggins, "Survey of Quartz Bulk Resonator Sensor Technologies," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 35, No. 3, pp. 323-330, May 1988.