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High precision pressure sensors employ
quartz thickness shear resonators. The
frequencies of these vary not only with pressure, but also with
temperature. Temperature control, or
compensation is used to minimize the errors due to temperature effects. Some pressure sensors have used a
temperature sensor that is external, but in close proximity, to the pressure
sensing resonator, and shielded from the applied pressure. However, when a temperature gradient exists
between the pressure and temperature sensors, such as may occur under
pressure and temperature transients, the accuracy of pressure measurement is
degraded.
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Dual-mode pressure sensors have been
proposed in which the b-mode is stress compensated and the c-mode is
temperature compensated. In such a
sensor, the b-mode indicates primarily the temperature of the sensing resonator,
and the c-mode indicates the applied pressure. As the b-mode’s frequency
depends on the temperature of the resonator’s vibrating volume, the effects
of temperature gradients are greatly reduced.
Under pressure transients, especially, dual-mode pressure sensors
allow for superior temperature sensing and compensation accuracy, and
superior pressure sensing accuracy.
The above diagram shows such a dual mode pressure sensor.
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R. J. Besson, J. J.
Boy, B. Glotin, Y. Jinzaki, B. Sinha, and M. Valdois, “A dual-mode
thickness-shear quartz pressure sensor,” IEEE Trans. Ultrason. Ferroelect.
Freq. Contr., Vol. 40, pp. 584-591, 1993.
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N.
Matsumoto, Y. Sudo, B. Sinha and M. Niwa, “Long-term stability and
performance characteristics of crystal gauge at high pressures and
temperatures,” Proc. 1999 IEEE Int’l Frequency Control Symp.
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